Carrier and Process Gas Delivery Heaters

Our PUR-Therm Gas Delivery Heater – with a design unique to Cast Aluminum Solutions – has been meticulously engineered and thoroughly tested to meet the semiconductor industry’s most stringent purity standards for the heating of carrier gases and process gases destined for the deposition chamber.

PUR-Therm was designed as a more efficient, more precise mechanism for heating carrier gases and chamber process gases (when compared to silicone wrap gas line heaters).
Gases are isolated in a .25″ (6.3mm) OD ultra-high purity seamless 316L seamless stainless steel flow tube, with pre-installed industry-standard ultra-high purity VCR fittings.
Third-party particle testing (for >=0.3 μm and >=0.1 μm size particles) shows PUR-Therm’s flow-tube meets the Semi F70 standard for Ultra-High Purity.
The flow-tube’s electropolished ID meets Semi F19 standards for Ultra High Purity: Avg. Ra = 2.53 μin (0.064262 μm), Maximum Ra = 3.19 μin (0.081026 μm).
The flow tube’s bend radius complies with Semi E49 Guidelines for Inert and Reactive Gases.
Passivation to ASTM-967 specificiations is standard.
Features a replaceable heating element: 400 Watts / 208 Volt is standard, with other options available.
A dual-sensor K-type thermocouple is standard (J-Type available upon request).
The optional insulating jacket meets Semi S2 touch-safe standards.

PUR-Therm Gas Delivery Heater Sheet

Third-party particulate matter testing using the Semi F70 protocol shows PUR-Therm’s flow-tube meets the Ultra High Purity specification for contaminants. This can be attributed to a low-Ra electropolished tube ID, multiple manufacturing controls, and a robust product test regime (including scanning electron microscopy, x-ray photoelectron spectroscopy, and AES analysis).

PUR-Therm Gas Delivery Heaters are designed to heat carrier and process gases much more efficiently than silicone gas line heaters while maintaining Ultra High Purity specifications. PUR-Therm Heaters are easily incorporated into gas cabinets using industry-standard process controls (PID, PLC, etc.) and UHP VCR fittings.

pur-therm gas delivery heaters

PUR-Therm Gas Delivery Heaters

Power Range: 400 – 1500 Watts	Max Pressure: 5100 psi (351 bar)
Flow-Tube: OD: .250” (1/4″) (6.3 mm) Wall: .035” (.89 mm) High-Purity Electropolished Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: Standard Max: 392°F (200°C)
No. of Tubes: 1 Tube with VCR Fittings	Download Pur-Therm Brochure

Circulation heater with Stainless Steel Tubes

CAST-X Heaters: Our CAST-X line of circulation heaters is available in 6 base sizes, with power ranges from .5 to 60 kW. Standard flow-tubes are 316 seamless SST, with EP options available. CAST-X circulation heaters are well-suited for heating DI water and other solvent removal products

CAST-X 500 Circulation Heaters

Power Range: 300 – 1500 Watts	Max Pressure: 5100 psi (351 bar)
Flow-Tube: OD: .250” (1/4″) (6.3 mm) Wall: .035” (.89 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: No Enclosure392°F (200°C) NEMA 1 (general purpose)250°F (121°C) NEMA 4 (water resistant)250°F (121°C) NEMA 7 (explosion proof)392°F (200°C)
No. of Tubes: 1 Tube	Download Cast-X 500 Brochure
	Download STEP Cast-X 500 Drawing

CAST-X 1000 Circulation Heaters

Power Range: 750-3000 Watts	Max Pressure: 2100 psi (144 bar)
Flow-Tube: OD: .313” (5/16″) (7.9 mm) Wall: .020” (1.7 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: No Enclosure662°F (350°C) NEMA 1 (water resistant)608°F (320°C) NEMA 1 with thermostat250°F (121°C) NEMA 4 (water resistant)777°F (555°C) NEMA 4 with thermostat250°F (121°C)
No. of Tubes: 1 Tube	Download Cast-X 1000 Brochure

CAST-X 2000 Circulation Heaters

Power Range: 1 – 5 kW	Max Pressure: 5100 psi (351 bar)
Flow-Tube: OD: .50” (1/2″) (12.7 mm) Wall: .065” (1.7 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: NEMA 1 (general purpose)482°F (250°C) NEMA 1 with standoff662°F (350°C) NEMA 1 with thermostat250°F (121°C) NEMA 4 (water resistant)350°F (175°C) NEMA 4 with standoff662°F (350°C) NEMA 7 (explosion proof)482°F (250°C)
No. of Tubes: 1 Tube	Download Cast-X 2000 Brochure

CAST-X 2500 Circulation Heaters

Power Range: 2.4 – 15 kW	Max Pressure: 4000 psi (275 bar)
Flow-Tube: OD: .625” (5/8″) (15.9 mm) Wall: .065” (1.7 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: NEMA 1 (general purpose) 662°F (350°C) NEMA 4 (water resistant)572°F (300°C) NEMA 7 (explosion proof)482°F (250°C) ATEX (explosion proof)482°F (250°
No. of Tubes: 2 Standard, 1 as Custom	Download Cast-X 2500 Brochure

CAST-X 3000 Circulation Heaters

Power Range: 2.6 – 27 kW	Max Pressure: 3300 psi (228 bar)
Flow-Tube: OD: .750” (3/4″) (19.1 mm) Wall: .065” (1.7 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: NEMA 4 (water resistant)572°F (300°C) NEMA 7 / ATEX (explosion proof)482°F (250°C)
No. of Tubes: 2 Standard, 1 as Custom	Download Cast-X 3000 Brochure

Circulation Heaters for Natural Gas Heating

CAST-X 4000 Circulation Heaters

Power Range: 12.5 – 60 kW	Max Pressure: 3100 psi (214 bar)
Flow-Tube: OD: .750” (3/4″) (19.1 mm) Wall: .065” (1.7 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: NEMA 4 (water resistant)572°F (300°C) NEMA 7 / ATEX (explosion proof)482°F (250°C)
No. of Tubes: 2 Standard, 1 as Custom	Download Cast-X 4000 Brochure

CAST-X High Temperature Circulation Heaters

CAST-X 500 High Temperature Circulation Heaters

Power Range: 565 – 1500 Watts	Max Pressure: 10700 psi (737 bar)
Flow-Tube: OD: .250” (1/4″) (6.3 mm) Wall: .035” (.89 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: No Enclosure 1112°F (600°C) NEMA 7 (explosion proof)1112°F (600°C)
No. of Tubes: 1 Tube	Download High Temperature Brochure

CAST-X 2000 High Temperature Circulation Heaters

Power Range: 1.2 – 6 kW	Max Pressure: 6800 psi (468 bar)
Flow-Tube: OD: .50” (1/2″) (12.7 mm) Wall: .065” (.89 mm) Seamless Stainless Steel (316L grade)	Enclosures and Max Temps.: NEMA 4 (water resistant)1112°F (600°C) NEMA 7 (explosion proof)1112°F (600°C)
No. of Tubes: 1 Tube	Download High Temp Brochure

pur-x Circulation Heaters

PUR-X 1000 and 2000 inline heaters feature field-replaceable high-purity PFA flow-tubes, compatible with many solvents. In some cases, the PFA tube is preferred over a stainless steel flow-tube. PUR-X Heaters are also appropriate for heating nitrogen, argon, and other gases used in wafer drying applications.

PUR-X 1000 Circulation Heaters

Power Range: 1.5 – 4.6 kW	Max Pressure: 70 psi (5 bar)
Flow-Tube: OD: .375” (3/8″) (9.52 mm) Wall: .031” (.80 mm) PFA (PerFluoroAlkoxy)	Enclosures and Max Temps.: NEMA 7 (explosion proof)392°F (200°C)
No. of Tubes: 1 Tube	Download Pur-X 1000 Brochure

PUR-X Heaters: This heater features a removable & replaceable PFA (Teflan^®) flow-tube. PFA Tube material is compatible with many caustic solvents. Tube replacement does not require a help ticket and can be customer-completed in under 30 minutes. PUR-X Heaters are appropriate for wafer cleaning, rinsing and drying applications

PUR-X 2000 Circulation Heaters

Power Range: 5 – 7.9 kW	Max Pressure: 70 psi (5 bar)
Flow-Tube: OD: .375” (3/8″) (9.52 mm) Wall: .031” (.80 mm) PFA (PerFluoroAlkoxy)	Enclosures and Max Temps.: NEMA 7 (explosion proof)392°F (200°C)
No. of Tubes: 1 Tube	Download Pur-X 2000 Brochure

Universal Solvent Heater

Our Universal Solvent Heater is specifically designed to heat low-flashpoint photoresist solvents. Liquids are isolated in the main flow-tube, never touching the heating element. Multiple sensors and a secondary cooling tube provide outstanding operating temperature control. The terminal enclosure is rated NEMA 7 explosion-proof, and the heater body is Teflon^®-coated for corrosion resistance.

universal solvent heater

Power Range:
6 – 8 kW

Max Pressure:
Solvent Tube: 3300 psi (228 bar)
Cooling Tube: 5100 psi (351 bar)

Flow-Tube:
OD: .750” (3/4″) (19.1 mm) Wall: .065” (1.7 mm) (Seamless 316 SST)

Cooling-Tube:
OD: .250” (1/4″) (6.3 mm) Wall: .035” (0.9 mm) (Seamless 316 SST)

Enclosures and Max Temps.:
NEMA 7 (explosion proof)392°F (200°C)

No. of Tubes:
1 Flowtube, 1 Cooling Tube

Download Universal Solvent Brochure

Universal Solvent Heater: Designed to heat low-flashpoint solvents (N-Methyl-Pyrrolidone, IPA, etc.). This heater features an explosion-proof NEMA 7 electrical enclosure, electropolished flow-tube ID, Teflon^®-covered body, and multiple temperature sensors. Fitting options include VCR, NPT, or Flaretek-style connections.

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