Wafer Cleaning, Rinsing, and Drying Applications
At Southeast Thermal Systems, we proudly distribute CAS’ high-performance fluid heating products, designed for both inline and recirculating tank installations. These heaters are essential for post-chamber wet bench and wafer drying processes, offering safe and efficient heating for flammable media without the risk of explosion or flashing.
Our range of inline heaters from CAS ensures precise and safe heating for silicon wafer wet bench processors, supporting etch removal and photoresist evaporation. All CAS heaters incorporate a critical ‘no contact’ design, where the heated media remains isolated within flow tubes, preventing contamination and direct contact with the heating element.
solvent heater
Several models are compatible with heating solvents. With the “no contact design” it is just a matter of selecting your purity level, and wattage. Heaters can be configured to safely handle flammable, low-flashpoint solvents and acids.
High Temp Gas Vaporization & Heating
Semi engineers and scientists are constantly developing new vaporizing and catalytic applications, which often involve very high temps. The CAST-X High Temp line of heaters supports these innovations with operating temps to 600°C.
DI Water Heating
For water in the higher mega-ohm range, our CAST-X 316 stainless steel tube heaters work well: the tubes can be electropolished and passivated to enhance compatibility. For lower resistivity water, the tube material can be switched to Hastelloy or another alloy. PUR-X Heaters are also appropriate for DI Water, as they have a PFA tube.
Gas for Wafer Drying Applications
CAST-X 500 and 2000 Models equipped with EP and Passivated ID tubes are popular choices for heating N2 for wafter drying. If a non-metal tube is required, our PUR-X 1000 is an excellent choice.
Warming of Carrier Gases
The PUR-Therm Heater was specifically designed for heating chamber carrier gases. The flow-tube meets Semi F-70 purity standards, and has orbitally-welded VCR fittings, for easy inline integration.
CAST-X Heaters: Our CAST-X line of circulation heaters is available in 6 base sizes, with power ranges from .5 to 60 kW. Standard flow-tubes are 316 seamless SST, with EP options available. CAST-X circulation heaters are well-suited for heating DI water and other solvent removal products
CAST-X 500 Circulation Heaters
CAST-X 1000 Circulation Heaters
CAST-X 2000 Circulation Heaters
CAST-X 2500 Circulation Heaters
CAST-X 3000 Circulation Heaters
CAST-X 4000 Circulation Heaters
CAST-X High Temperature Circulation Heaters
CAST-X Heaters: Our CAST-X line of circulation heaters is available in 6 base sizes, with power ranges from .5 to 60 kW. Standard flow-tubes are 316 seamless SST, with EP options available. CAST-X circulation heaters are well-suited for heating DI water and other solvent removal products.
CAST-X 500 High Temperature Circulation Heaters
CAST-X 2000 High Temperature Circulation Heaters
pur-x Circulation Heaters
PUR-X 1000 and 2000 inline heaters feature field-replaceable high-purity PFA flow-tubes, compatible with many solvents. In some cases, the PFA tube is preferred over a stainless steel flow-tube. PUR-X Heaters are also appropriate for heating nitrogen, argon, and other gases used in wafer drying applications.
PUR-X 1000 Circulation Heaters
PUR-X Heaters: This heater features a removable & replaceable PFA (Teflan®) flow-tube. PFA Tube material is compatible with many caustic solvents. Tube replacement does not require a help ticket and can be customer-completed in under 30 minutes. PUR-X Heaters are appropriate for wafer cleaning, rinsing and drying applications
PUR-X 2000 Circulation Heaters
Universal Solvent Heater
Our Universal Solvent Heater is specifically designed to heat low-flashpoint photoresist solvents. Liquids are isolated in the main flow-tube, never touching the heating element. Multiple sensors and a secondary cooling tube provide outstanding operating temperature control. The terminal enclosure is rated NEMA 7 explosion-proof, and the heater body is Teflon®-coated for corrosion resistance.
universal solvent heater
Universal Solvent Heater: Designed to heat low-flashpoint solvents (N-Methyl-Pyrrolidone, IPA, etc.). This heater features an explosion-proof NEMA 7 electrical enclosure, electropolished flow-tube ID, Teflon®-covered body, and multiple temperature sensors. Fitting options include VCR, NPT, or Flaretek-style connections.
pur-therm gas delivery heaters
PUR-Therm Gas Delivery Heaters
