Precision-Engineered Pedestal Heaters
At Southeast Thermal Systems, we pride ourselves on working closely with industry-leading partners to deliver high-performance pedestal heaters. Our team is dedicated to ensuring excellence at every stage, from understanding your specific needs and reviewing initial designs, to collaborating on thermal and structural modeling. We support you through prototyping, testing, and the smooth transition into high-volume production.
With a focus on teamwork and precision, Southeast Thermal Systems ensures that each heating solution is tailored to meet the unique challenges of your application.
- Our cast-in approach delivers long heater life and unmatched thermal uniformity. Vacuum brazed and interference fit construction (IFC) approaches are excellent non-cast alternatives.
- Aluminum 356 is the primary casting alloy for pedestal heaters, with exceptional compatibility for most process environments, and a maximum operating temperature of 450°C (840°F), with typical temperature uniformity of ±0.3% or better.
- With IFC, aluminum 6061 can be utilized, or for higher operating temperatures, CAS offers solutions in various stainless steel grades, copper, nickel, and other high-performance alloys.
- Precision CNC machining creates components that meet rigorous flatness requirements; surface features, such as wafer lift holes, proximity pins, and vacuum groove arrays are also available.
- Shafts are integrated via TIG or electron beam welding then helium leak checked for vacuum integrity.
- Coating options include hard-coat anodizing, electroless nickel plate, gold or copper plate, powder coating options, micro lapping, and more. Passivation procedures are also available.
- Cleaning and packaging to semi-industry specifications is available at our in-house cleanroom facility.
A cast-in heater offers several performance advantages over competing technologies. With the cast-in design, heating elements maintain intimate contact with the metal substrate, delivering uniform heat transfer and longer overall life, for a lower total cost of ownership.
Testing, assembly and packaging procedures can be accomplished in our on-site cleanroom. Semiconductor components from Cast Aluminum Solutions are available with final ultrasonic cleaning or passivation procedures. Packaging options that meet specific Semi standards are also available.
Using Finite Element Analysis (FEA), including the industry-leading Ansys® software suite, CAS Engineers develop thermal and structural models to evaluate the performance of heaters and components before prototypes are produced. These advanced tools allow optimal performance can be achieved with fewer manufacturing iterations.
CAS excels at developing and manufacturing highly-evolved wafer heaters. Features such as cooling tubes and multiple heating zones may be incorporated, permitting shorter cycle times and improved temperature management. To facilitate seamless integration with control packages, pedestal heaters are equipped with thermocouple or RTD sensors.
For applications exceeding the parameters of our cast-in approach, CAS offers interference fit construction (IFC), which utilizes aluminum 6061. For applications above aluminum’s temperature limit, stainless steel, Inconel, copper, or other substrates may be selected. Joints may be electron-beam welded to provide compatibility with high-vacuum applications.
